SEMICONDUCTOR DEVICES AND MANUFACTURING METHODS FOR THE SAME

A semiconductor device includes a substrate having an active region defined by a device separation layer, a plurality of bit lines on the substrate, a buried contact disposed on the substrate between adjacent bit lines among the plurality of bit lines and connected to the active region, an intermedi...

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Hauptverfasser:	Noh, Halim, Bae, Sunghoon, Shin, Heecheol, EOM, Taeyoung
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
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creator	Noh, Halim Bae, Sunghoon Shin, Heecheol EOM, Taeyoung
description	A semiconductor device includes a substrate having an active region defined by a device separation layer, a plurality of bit lines on the substrate, a buried contact disposed on the substrate between adjacent bit lines among the plurality of bit lines and connected to the active region, an intermediate conductive layer disposed on the buried contact, a landing pad disposed on the intermediate conductive layer, and an insulating pattern on a sidewall of the landing pad and contacting at least a portion of a top surface of the intermediate conductive layer.
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title	SEMICONDUCTOR DEVICES AND MANUFACTURING METHODS FOR THE SAME
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