System and Method for Die Crack Detection in Wafer-to-Wafer Bonding

In wafer-to-wafer bonding, a first die is bonded to a second die at a bonding interface. Various configurations of capacitors are placed along an inner portion of an edge seal of the bonded dies to detect a discontinuity in the bonding interface. These configurations include interdigitated capacitors, which can be horizontally or vertically oriented, parallel-digitated capacitors, and pillars forming a parameter around the dies with conductive portions offset from the pillar and extending inside the dies. Other configurations can be used.