SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

A substrate processing system that performs substrate processing includes: a first processing system having one of a wet processing apparatus and a dry processing apparatus; a second processing system having the other one of the wet processing apparatus and the dry processing apparatus, wherein the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TERAMOTO, Akihiro, TAKAKI, Shinsuke, NAKASHIMA, Seiji, SHOBU, Ryo
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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