HEAT TREATMENT CHAMBER, FILM FORMING APPARATUS, AND SUBSTRATE HEATING METHOD

A heat treatment chamber for performing a heat treatment on a substrate, includes a chamber housing surrounding the substrate, a light transmitting window forming a part of the chamber housing, and an LED light source, provided on an outer side of the chamber housing, and configured to irradiate lig...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OHASHI, Haruhisa, INOUE, Takahiro, KUROKAWA, Gohei
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER PHYSICS
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