SEMICONDUCTOR DEVICE HAVING HIGH BREAKDOWN VOLTAGE CAPACITOR

A semiconductor device includes a bottom metal line and a bottom electrode disposed on a substrate, a thick inter-metal dielectric layer disposed on the bottom metal line and the bottom electrode, a first via disposed on the bottom metal line disposed in the thick inter-metal dielectric layer, a sec...

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Bibliographische Detailangaben
Hauptverfasser: JEONG, Jong Yeul, KOO, Sang Geun, SHEEN, Jeong Ho, SHIN, Kang Sup
Format: Patent
Sprache:eng
Schlagworte:
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