Workpiece Processing Apparatus with Contact Temperature Sensor

A semiconductor fabrication apparatus for processing one or more workpieces is provided. The apparatus includes one or more components exposed to radio frequency energy or heat and one or more optical contact temperature sensors disposed on the one or more components. Methods for measuring temperatu...

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Bibliographische Detailangaben
Hauptverfasser:	Shervegar, Avinash, Wong, Calvin, Ambal, Hari, Yang, Zhaotong
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	A semiconductor fabrication apparatus for processing one or more workpieces is provided. The apparatus includes one or more components exposed to radio frequency energy or heat and one or more optical contact temperature sensors disposed on the one or more components. Methods for measuring temperature of a component of a semiconductor fabrication apparatus are also provided.