LIGHT SENSING ELEMENT AND MANUFACTURING METHOD THEREOF

LIGHT SENSING ELEMENT AND MANUFACTURING METHOD THEREOF

The present invention provides a manufacturing method of a light sensing element. The method includes the following steps: providing a preformed structure, wherein the preformed structure includes a semiconductor structure and a bandpass filter layer stacked on the semiconductor structure; performin...

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Hauptverfasser: LIAO, Keng-Ying, LIU, Yang-Ting, CHANG, You-Hsien
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator LIAO, Keng-Ying
LIU, Yang-Ting
CHANG, You-Hsien
description The present invention provides a manufacturing method of a light sensing element. The method includes the following steps: providing a preformed structure, wherein the preformed structure includes a semiconductor structure and a bandpass filter layer stacked on the semiconductor structure; performing a laser cutting process on the preformed structure along a direction perpendicular to a surface of the bandpass filter layer so that the preformed structure is cut into a plurality of light sensing elements. Each light sensing element has a plurality of sidewalls. Each sidewall forms a scorched surface by the laser cutting process to block the entry of external light.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title LIGHT SENSING ELEMENT AND MANUFACTURING METHOD THEREOF
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