PROTECTION OF SENSING ELEMENT DURING MOULDING

A sensor package comprises an active element with a first region and an opposite second region. The first region includes a sensing structure. The second region comprises at least one contact pad. A moulding compound encapsulates the second region and not the first region. The active element compris...

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Hauptverfasser: MAES, Ben, ROOMAN, Cathleen, VAN DER WIEL, Appo, CHEN, Jian, DIDDEN, Jeroen
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creator MAES, Ben
ROOMAN, Cathleen
VAN DER WIEL, Appo
CHEN, Jian
DIDDEN, Jeroen
description A sensor package comprises an active element with a first region and an opposite second region. The first region includes a sensing structure. The second region comprises at least one contact pad. A moulding compound encapsulates the second region and not the first region. The active element comprises at least one conductive line for routing signals from the sensing structure to the contact pad. The projection of the conductive line over the active element corresponds to a portion of the external surface of the active element. The active element comprises at least one dummy track providing a protrusion thereby raising a portion of the surface of the active element to at least the same height as the portion corresponding to the conductive line. These protrusions can receive mechanical pressure from a moulding insert applied during manufacture, relieving pressure over the portion of the surface including the conductive lines.
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subjects MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
title PROTECTION OF SENSING ELEMENT DURING MOULDING
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