SEMICONDUCTOR DEVICE WITH TWO-PHASE COOLING STRUCTURE

A semiconductor device includes a semiconductor chip including a semiconductor integrated circuit; a cooling channel including a surface of the semiconductor chip and configured to provide a passage for a coolant to cool the semiconductor chip; and a plurality of flexible capillary patterns on the s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANG, Sungchan, HONG, Seogwoo, SON, Daehyuk, LEE, Jeongyub
Format: Patent
Sprache:eng
Schlagworte:
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