OPTICAL INSPECTION OF A WAFER

An image analysis device may align an image to determine a position of a wafer within the image. The wafer may include a plurality of wafer bumps. The image analysis device may mask, based on the position of the wafer, the image to obtain an image of a portion of the wafer. The image analysis device...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PAI, Jiun-Rong, HU, Cheng-Kang, WU, Cheng-Lung, CHEN, Chih-Lieh
Format: Patent
Sprache:eng
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