VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE
Various arrangements for a microelectromechanical (MEMS) die and a controller die in vertically stacked structures are disclosed. The orientations of the MEMS die and the controller die vary in the various arrangements. In one embodiment, a backside surface of the MEMS die is operably connected to a...
Gespeichert in:
| Hauptverfasser: | , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | Castillou, Paul Hammond, Jonathan Hale Van Kampen, Robertus Petrus Gaddi, Roberto Renault, Mickael Barron, Lance Costa, Julio C |
| description | Various arrangements for a microelectromechanical (MEMS) die and a controller die in vertically stacked structures are disclosed. The orientations of the MEMS die and the controller die vary in the various arrangements. In one embodiment, a backside surface of the MEMS die is operably connected to a frontside surface of the controller die. In another embodiment, a backside surface of the MEMS die is operably connected to a backside surface of the controller die. In another embodiment, a frontside surface of the MEMS die is operably connected to a backside surface of the controller die. In yet another embodiment, a frontside surface of the MEMS die is operably connected to a frontside surface of the controller die. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2024199411A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2024199411A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2024199411A13</originalsourceid><addsrcrecordid>eNrjZDANcw0K8XR29PGJVAgOcXT2dnVR8HX1DVZwcQ3zdHYNVnD0c1Fw9vcLCfL38XENggrzMLCmJeYUp_JCaW4GZTfXEGcP3dSC_PjU4oLE5NS81JL40GAjAyMTQ0tLE0NDR0Nj4lQBAIplKIw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE</title><source>esp@cenet</source><creator>Castillou, Paul ; Hammond, Jonathan Hale ; Van Kampen, Robertus Petrus ; Gaddi, Roberto ; Renault, Mickael ; Barron, Lance ; Costa, Julio C</creator><creatorcontrib>Castillou, Paul ; Hammond, Jonathan Hale ; Van Kampen, Robertus Petrus ; Gaddi, Roberto ; Renault, Mickael ; Barron, Lance ; Costa, Julio C</creatorcontrib><description>Various arrangements for a microelectromechanical (MEMS) die and a controller die in vertically stacked structures are disclosed. The orientations of the MEMS die and the controller die vary in the various arrangements. In one embodiment, a backside surface of the MEMS die is operably connected to a frontside surface of the controller die. In another embodiment, a backside surface of the MEMS die is operably connected to a backside surface of the controller die. In another embodiment, a frontside surface of the MEMS die is operably connected to a backside surface of the controller die. In yet another embodiment, a frontside surface of the MEMS die is operably connected to a frontside surface of the controller die.</description><language>eng</language><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TRANSPORTING</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240620&DB=EPODOC&CC=US&NR=2024199411A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240620&DB=EPODOC&CC=US&NR=2024199411A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Castillou, Paul</creatorcontrib><creatorcontrib>Hammond, Jonathan Hale</creatorcontrib><creatorcontrib>Van Kampen, Robertus Petrus</creatorcontrib><creatorcontrib>Gaddi, Roberto</creatorcontrib><creatorcontrib>Renault, Mickael</creatorcontrib><creatorcontrib>Barron, Lance</creatorcontrib><creatorcontrib>Costa, Julio C</creatorcontrib><title>VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE</title><description>Various arrangements for a microelectromechanical (MEMS) die and a controller die in vertically stacked structures are disclosed. The orientations of the MEMS die and the controller die vary in the various arrangements. In one embodiment, a backside surface of the MEMS die is operably connected to a frontside surface of the controller die. In another embodiment, a backside surface of the MEMS die is operably connected to a backside surface of the controller die. In another embodiment, a frontside surface of the MEMS die is operably connected to a backside surface of the controller die. In yet another embodiment, a frontside surface of the MEMS die is operably connected to a frontside surface of the controller die.</description><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDANcw0K8XR29PGJVAgOcXT2dnVR8HX1DVZwcQ3zdHYNVnD0c1Fw9vcLCfL38XENggrzMLCmJeYUp_JCaW4GZTfXEGcP3dSC_PjU4oLE5NS81JL40GAjAyMTQ0tLE0NDR0Nj4lQBAIplKIw</recordid><startdate>20240620</startdate><enddate>20240620</enddate><creator>Castillou, Paul</creator><creator>Hammond, Jonathan Hale</creator><creator>Van Kampen, Robertus Petrus</creator><creator>Gaddi, Roberto</creator><creator>Renault, Mickael</creator><creator>Barron, Lance</creator><creator>Costa, Julio C</creator><scope>EVB</scope></search><sort><creationdate>20240620</creationdate><title>VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE</title><author>Castillou, Paul ; Hammond, Jonathan Hale ; Van Kampen, Robertus Petrus ; Gaddi, Roberto ; Renault, Mickael ; Barron, Lance ; Costa, Julio C</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2024199411A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2024</creationdate><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Castillou, Paul</creatorcontrib><creatorcontrib>Hammond, Jonathan Hale</creatorcontrib><creatorcontrib>Van Kampen, Robertus Petrus</creatorcontrib><creatorcontrib>Gaddi, Roberto</creatorcontrib><creatorcontrib>Renault, Mickael</creatorcontrib><creatorcontrib>Barron, Lance</creatorcontrib><creatorcontrib>Costa, Julio C</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Castillou, Paul</au><au>Hammond, Jonathan Hale</au><au>Van Kampen, Robertus Petrus</au><au>Gaddi, Roberto</au><au>Renault, Mickael</au><au>Barron, Lance</au><au>Costa, Julio C</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE</title><date>2024-06-20</date><risdate>2024</risdate><abstract>Various arrangements for a microelectromechanical (MEMS) die and a controller die in vertically stacked structures are disclosed. The orientations of the MEMS die and the controller die vary in the various arrangements. In one embodiment, a backside surface of the MEMS die is operably connected to a frontside surface of the controller die. In another embodiment, a backside surface of the MEMS die is operably connected to a backside surface of the controller die. In another embodiment, a frontside surface of the MEMS die is operably connected to a backside surface of the controller die. In yet another embodiment, a frontside surface of the MEMS die is operably connected to a frontside surface of the controller die.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US2024199411A1 |
| source | esp@cenet |
| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-20T23%3A48%3A57IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Castillou,%20Paul&rft.date=2024-06-20&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2024199411A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |