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A composite photoresist material and method of making the composite photoresist material. The composite photoresist material includes: a photoresist layer devoid of a phenoxy resin, and a photoresist layer containing a phenoxy resin.

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Bibliographische Detailangaben
1. Verfasser: Weaver, Sean T
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A composite photoresist material and method of making the composite photoresist material. The composite photoresist material includes: a photoresist layer devoid of a phenoxy resin, and a photoresist layer containing a phenoxy resin.