PROCESSING SYSTEM AND TRANSFER METHOD

A processing system includes: a chamber in which a consumable member is installed; a storage module configured to store the consumable member; a position detection sensor configured to detect a position of the consumable member; a vacuum transfer module connected to the chamber and the storage modul...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KITA, Masatomo, AMIKURA, Norihiko
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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