CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT IN MIXED REALITY ENVIRONMENTS

Various embodiments herein relate to a Mixed Reality (MR) control platform to operate a semiconductor manufacturing tool in an MR environment and to display data associated with the semiconductor manufacturing tool. In son embodiments, the MR control platform comprises an MR control system and an MR...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chan, Henry T, Bernier, Terrence George, Huang, Chung-Ho, Thorgrimsson, Christopher, Unterguggenberger, Rainer
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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