ELECTRON BEAM IRRADIATION DEVICE

An electron beam irradiation device (1) irradiates an electron beam from an electrode (12) that is connected to a tip of a conductive part (21) which projects inside a vacuum container (11), to the exterior of the vacuum container (11) via a metal foil (111) that constitutes a portion of a periphera...

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Hauptverfasser: HAYASHI, Hirotaka, BABA, Takashi, ASANO, Hideyuki, SHIRAHASHI, Tomonori
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creator HAYASHI, Hirotaka
BABA, Takashi
ASANO, Hideyuki
SHIRAHASHI, Tomonori
description An electron beam irradiation device (1) irradiates an electron beam from an electrode (12) that is connected to a tip of a conductive part (21) which projects inside a vacuum container (11), to the exterior of the vacuum container (11) via a metal foil (111) that constitutes a portion of a peripheral wall of the vacuum container (11). The electron beam irradiation device (1) includes a tubular insulator (22) that surrounds the periphery of the conductive part (21) in the vacuum container (11), and an amorphous carbon film (23) that covers the outer peripheral surface of the insulator (22).
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title ELECTRON BEAM IRRADIATION DEVICE
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