MEASURING APPARATUS AND TESTING APPARATUS HAVING THE SAME

A measuring apparatus includes a first beam splitter, a diffraction grating, an optical illumination system, an optical condensing system configured to condense an electromagnetic wave EH radiated from the specimen, a time domain detector configured to detect the electromagnetic wave EH, for each ti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HIDAKA, Yasuhiro, KIM, Ingi
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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