SCRUBBER SYSTEM AND WET CLEANING METHOD USING THE SAME

A scrubber system may include a scrubber housing including a vertically extended cleaning space, an inflow chamber coupled to a bottom portion of the scrubber housing, and first and second inflow portions, each of which is configured to supply a gas into the inflow chamber. The inflow chamber may in...

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Hauptverfasser: JOO, Jinkyoung, KIM, Heesub, PARK, Hee Ock, YOON, Sung Chul, ROH, Young Seok, BAE, Jongyong, GIM, Suji, LEE, Sunsoo, JEON, Dong Keun
Format: Patent
Sprache:eng
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