METHOD FOR DETERMINING ANTENNA RULE FOR RADIO-FREQUENCY DEVICE

METHOD FOR DETERMINING ANTENNA RULE FOR RADIO-FREQUENCY DEVICE

A method for determining antenna rule for a radio-frequency (RF) device includes the steps of forming a gate structure on a substrate, forming a source/drain region adjacent to the gate structure, forming a first metal routing on the source/drain region, and then forming a second metal routing on th...

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Bibliographische Detailangaben
Hauptverfasser: CHEN, XINGXING, Wen, Ching-Yang, Verma, Purakh Raj
Format: Patent
Sprache:eng
Schlagworte:
ANTENNAS, i.e. RADIO AERIALS
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method for determining antenna rule for a radio-frequency (RF) device includes the steps of forming a gate structure on a substrate, forming a source/drain region adjacent to the gate structure, forming a first metal routing on the source/drain region, and then forming a second metal routing on the gate structure. Preferably, a sum of an area of the first metal routing and an area of the second metal routing divided by an area of the gate structure is less than a ratio.