MATCHING NETWORK MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

Provided is a matching network module including a plurality of housings individualized to reduce cross radio frequency (RF) interference, a plurality of matching networks respectively mounted in the plurality of housings to separately perform impedance matching between a plurality of RF generators a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOI, Yoon Seok, KANG, Hanlim, WI, Sung Suk
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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