VERTICAL LED CHIP STRUCTURE, METHOD OF MANUFACTURING SAME AND LIGHT-EMITTING DEVICE

A vertical LED chip structure, a method of manufacturing the same, and a light-emitting device are provided. After an epitaxial structure is bonded to a substrate, the epitaxial structure is etched first to form a first mesa. After the first mesa is formed, the epitaxial structure is continuously et...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BAI, Xiao, HU, Pengjie, LIU, Shengnan, LIU, Jiayu, KE, Weifan
Format: Patent
Sprache:eng
Schlagworte:
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