MODULAR PRESSURIZED WORKSTATION

In an embodiment, a system, includes: a first pressurized load port interfaced with a workstation body; a second pressurized load port interfaced with the workstation body; the workstation body maintained at a set pressure level, wherein the workstation body comprises an internal material handling s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANG, Yueh-Lun, HSU, Kuang Huan, CHEN, Jeff, HUANG, Steven, HUANG, Chun-Jung, HSU, Yung-Lin
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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