DEVICE FOR PRODUCING A PLASMA COMPRISING A PLASMA IGNITION UNIT

A device for producing a plasma, configured to generate a plasma from a reaction gas, wherein the device for producing a plasma comprises a microwave generator operating at a given source frequency comprised within a microwave frequency range and a waveguide coupled to the microwave generator and co...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RENAUT, Nicolas, LATRASSE, Louis, ZOUBIAN, Fadi
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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