MEASURING METHOD AND MEASURING DEVICE

According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a first surface side of a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image including the partition, which is generated by emitting...

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Bibliographische Detailangaben
Hauptverfasser:	TOMITA, Satoru, ENDOU, Kazuyuki, MAKISHI, Kota
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a first surface side of a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image including the partition, which is generated by emitting electromagnetic waves from the first surface side of the base or a second surface side opposed to the first surface of the base, analyzing the acquired first image, and measuring an amount of protrusion at which the end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.