METHOD OF DETERMINING A BRIGHTNESS OF A CHARGED PARTICLE BEAM, METHOD OF DETERMINING A SIZE OF A SOURCE OF THE CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE

A method of determining a brightness (Br) of a charged particle beam (11) focused by a focusing lens (120) toward a sample (10) in a charged particle beam imaging device (100) is described. The method includes (a) taking one or more images (hf, 1 . . . N) of the sample with the charged particle beam...

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Bibliographische Detailangaben

Hauptverfasser:	Firnkes, Matthias, Ehberger, Dominik, Breuer, John
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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