SEMICONDUCTOR DEVICE

A semiconductor device includes a substrate, a plurality of semiconductor patterns spaced apart from each other in a first horizontal direction on the substrate, where each of the plurality of semiconductor patterns has first side surfaces opposing each other in the first horizontal direction and se...

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Hauptverfasser: YONG, Jaecheon, KO, Daehong
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KO, Daehong
description A semiconductor device includes a substrate, a plurality of semiconductor patterns spaced apart from each other in a first horizontal direction on the substrate, where each of the plurality of semiconductor patterns has first side surfaces opposing each other in the first horizontal direction and second side surfaces opposing each other in a second horizontal direction, the first and second horizontal directions parallel to an upper surface of the substrate, the second horizontal direction perpendicular to the first horizontal direction, source/drain regions on the second side surfaces of each of the plurality of semiconductor patterns, a plurality of gate patterns surrounding upper surfaces, lower surfaces, and the first side surfaces of each of the plurality of semiconductor patterns, a plurality of conductive line patterns connecting the plurality of gate patterns to each other, and data storage structures in parallel to the plurality of semiconductor patterns in the second horizontal direction.
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title SEMICONDUCTOR DEVICE
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