THIN FILM TRANSISTOR, TRANSISTOR ARRAY SUBSTRATE, AND METHOD FOR FABRICATING THE TRANSISTOR ARRAY SUBSTRATE

A transistor array substrate includes a substrate, an active layer disposed on the substrate and including a channel region, a source region and a drain region, a gate insulating layer disposed on a part of the active layer, a gate electrode overlapping the channel region of the active layer and inc...

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Hauptverfasser: LEE, Woo Geun, KIM, Jee Hoon, SON, Seung Sok, MOON, Sung Gwon, KANG, Dong Han, YANG, Shin Hyuk
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creator LEE, Woo Geun
KIM, Jee Hoon
SON, Seung Sok
MOON, Sung Gwon
KANG, Dong Han
YANG, Shin Hyuk
description A transistor array substrate includes a substrate, an active layer disposed on the substrate and including a channel region, a source region and a drain region, a gate insulating layer disposed on a part of the active layer, a gate electrode overlapping the channel region of the active layer and included in an electrode conductive layer which is disposed on the gate insulating layer, a source electrode included in the electrode conductive layer and in contact with a part of the source region of the active layer, and a drain electrode included in the electrode conductive layer and in contact with a part of the drain region of the active layer. The active layer includes an oxide semiconductor including crystals and is disposed as an island shape excluding a hole in a plan view.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title THIN FILM TRANSISTOR, TRANSISTOR ARRAY SUBSTRATE, AND METHOD FOR FABRICATING THE TRANSISTOR ARRAY SUBSTRATE
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