FIELD-EFFECT TRANSISTOR WITH UNIFORM SOURCE/DRAIN REGIONS ON SELF-ALIGNED DIRECT BACKSIDE CONTACT STRUCTURES OF BACKSIDE POWER DISTRIBUTION NETWORK (BSPDN)
Provided is field-effect transistor structure including: a channel structure; a source/drain region and a 2nd source/drain region connected to each other through the channel structure; a 1st contact plug, on a top surface of the 1st source/drain region, connected to a voltage source or 1st circuit e...
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creator | SEO, Kang-Ill HONG, Wonhyuk LEE, Jongjin |
description | Provided is field-effect transistor structure including: a channel structure; a source/drain region and a 2nd source/drain region connected to each other through the channel structure; a 1st contact plug, on a top surface of the 1st source/drain region, connected to a voltage source or 1st circuit element through a back-end-of-line (BEOL) structure; and a 2nd contact plug, on a bottom surface of the 2nd source/drain region, connected to the 1st voltage source, through a backside power rail, or another circuit element, wherein the 1st source/drain region and the 2nd source/drain region have a substantially same height. |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | FIELD-EFFECT TRANSISTOR WITH UNIFORM SOURCE/DRAIN REGIONS ON SELF-ALIGNED DIRECT BACKSIDE CONTACT STRUCTURES OF BACKSIDE POWER DISTRIBUTION NETWORK (BSPDN) |
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