INTERCONNECT STRUCTURE WITH INCREASED DECOUPLING CAPACITANCE

A semiconductor chip device includes a substrate with a first dielectric material of a first permittivity value. A power input line and ground line are positioned in the substrate and arranged to form a decoupling capacitor. A region of the substrate in between the power input line and the ground line is doped with a second dielectric material of a second permittivity value that is higher than the first permittivity value. The region doped with the second dielectric material lacks a signal body. By incorporating a region with higher permittivity, in what is generally unused space for power delivery, the region becomes a decoupling capacitor for nearby power delivery elements. By adding decoupling capacitance to the previously unused space, noise in a circuit is more easily controlled and the chip device becomes more reliable.