METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES

Embodiments described herein generally relate to equipment used in the manufacturing of electronic devices, and more particularly, to a cleaning system, cleaning system hardware and related methods which may be used to transport and clean the surface of a substrate. According to one embodiment, a su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VALAZQUEZ, Edwin, GOLUBOVSKY, Edward, BLANK, Adrian S, RANGARAJAN, Jagan, JAGANNATHAN, Balasubramaniam C, ZUNIGA, Steven M
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS TRANSPORTING
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