DOUBLE-SIDED EMBEDDED MEMORY ARRAY

A semiconductor structure is presented including a first memory array and a second memory array directly connected to the first memory array by nanosheet stacks and backside contacts. The first and second memory arrays collectively define a double-sided memory array on a complementary metal oxide se...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tsai, Wu-Chang, Dutta, Ashim, Yang, Chih-Chao, Zhao, Ailian
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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