MAINTENANCE PREDICTION FOR MODULES OF A MICROSCOPE

A module for a microscope includes at least one sensor and/or at least one actuator, and a control and evaluation unit. The control and evaluation unit is configured to determine current parameter values of parameters of the sensor and/or of the actuator, analyze the parameter values using a statist...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Weber, Markus, Bamberger, Stefan
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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