CLEANING APPARATUS FOR WAFER STORAGE CONTAINER

According to an embodiment of the present disclosure, the cleaning apparatus includes a cleaning tank body having a body opening and a cleaning space; a lid provided to be openable and closable with respect to the body opening; a mounting stage provided in the cleaning space placing a shell of a waf...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ISHIHARA, Junji, YAMAZAKI, Katsuhiro, NISHIBE, Yukinobu, MIYASAKO, Hisaaki
Format:	Patent
Sprache:	eng
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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