BACKSIDE CONTACT WITH FULL WRAP-AROUND CONTACT

A semiconductor device having a source/drain having a height, a length, and a width. A full wrap-around contact surrounds a partial length of the source/drain. The full wrap-around contact includes a frontside recessed wrap-around contact from a front side of the source/drain and a backside conducti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Clevenger, Lawrence A, Anderson, Brent A, Choi, Kisik, Xie, Ruilong
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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