INTERFACE TOOL

A closed gas circulation system may include a sealed plenum, circulation fans, and a fan filter unit (FFU) inlet to contain, filter, condition, and re-circulate a gas through a chamber of an interface tool. The gas provided to the chamber is maintained in a conditioned environment in the closed gas...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIN, Mu-Tsang, NI, Chyi-Tsong, HSU, Jyh-Shiou, LIN, Su-Horng
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING RANGES SEMICONDUCTOR DEVICES VENTILATING WEAPONS
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