ASSESSMENT SYSTEM, METHOD OF ASSESSING

Assessment systems and methods are disclosed. In one arrangement, charged particles are directed in sub-beams arranged in a multi-beam towards a sample. A plurality of control electrodes define a control lens array. Each control lens in the control lens array is aligned with a sub-beam path of a res...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	WIELAND, Marco Jan-Jaco
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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