MULTI-CHANNEL LIGHT SOURCE FOR PROJECTION OPTICS HEATING

Systems, apparatuses, and methods are provided for heating a plurality of optical components. An example method can include receiving an input radiation beam from a radiation source. The example method can further include generating a plurality of output radiation beams based on the input radiation...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN BOKHOVEN, Laurentius Johannes Adrianus, AJGAONKAR, Mahesh Upendra
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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