Miniature Pressure/Force Sensor With Integrated Leads

A pressure/force sensor comprises a diaphragm structure including a sensing element and a lead structure extending from the diaphragm structure and including first and second traces electrically coupled to the sensing element. The diaphragm structure and the lead structure include a circuit assembly...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Olsen, Clark T, Myers, Dean E, Davis, Michael W, Riemer, Douglas P, Lang, Matthew S, Ladwig, Peter F
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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