PLASMA TREATMENT APPARATUS

A plasma treatment apparatus includes a treatment chamber 2 and a gas supply device 30 for supplying a treatment gas into the treatment chamber 2. The gas supply device 30 includes: a mass flow controller box 40 having an intake port 41 and an exhaust port 42; a plurality of pipes 43 to each of whic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nagai, Koji, Sato, Kohei, Matsuyoshi, Tsutomu, Isomura, Ryoichi, Kiyosue, Kentaro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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