EVAPORATION SYSTEM HAVING IMPROVED COLLIMATION

EVAPORATION SYSTEM HAVING IMPROVED COLLIMATION

A system for deposition of evaporated material on a substrate is provided. The substrate has a central axis. The system includes an evaporation vacuum chamber, at least one nozzle assembly, and a shadow mask. The nozzle assembly has a three-point plurality of point evaporation sources disposed adjac...

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Hauptverfasser: CONSIDINE, Timothy, SZIKLAS, Laurie, KHAYRULLIN, Ilyas I, LIN, Howard, BRAUN, Tim, FRAYER, Maxim, TICE, Kerry, GHOSH, Amalkumar P, VAZAN, Fridrich, ZHAO, Fangchao
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Sprache:eng
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APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
PERFORMING OPERATIONS
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
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creator CONSIDINE, Timothy
SZIKLAS, Laurie
KHAYRULLIN, Ilyas I
LIN, Howard
BRAUN, Tim
FRAYER, Maxim
TICE, Kerry
GHOSH, Amalkumar P
VAZAN, Fridrich
ZHAO, Fangchao
description A system for deposition of evaporated material on a substrate is provided. The substrate has a central axis. The system includes an evaporation vacuum chamber, at least one nozzle assembly, and a shadow mask. The nozzle assembly has a three-point plurality of point evaporation sources disposed adjacent to the central axis of the substrate and at a distance from the substrate whereby the nozzle assembly provides for molecules of evaporated material to arrive at the substrate at an incident angle of less than or equal to 5 degrees.
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subjects APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
PERFORMING OPERATIONS
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
title EVAPORATION SYSTEM HAVING IMPROVED COLLIMATION
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