Epitaxial Substrate Having a 2D Material Interposer, Method for Manufacturing the Epitaxial Substrate, and Device Prepared from the Epitaxial Substrate

An epitaxial substrate having a 2D material interposer, the epitaxial substrate extending along an epitaxial interface direction, wherein the epitaxial substrate includes: a polycrystalline base substrate having a superficial layer, a wafer bevel, and a back surface, wherein a difference in coeffici...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SUNG, Kao-Mei, SHIH, Neng-Tai, WANG, Hsiao-Lei
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!