HIGH ELECTRON MOBILITY TRANSISTOR DEVICES HAVING A SILICIDED POLYSILICON LAYER

The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to high electron mobility transistor (HEMT) devices having a silicided polysilicon layer. The present disclosure may provide an active re...

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Bibliographische Detailangaben
Hauptverfasser: ADUSUMILLI, SIVA P, JAIN, VIBHOR, KANTAROVSKY, JOHNATAN AVRAHAM, LEVY, MARK DAVID, GEBRESELASIE, EPHREM, NGU, YVES
Format: Patent
Sprache:eng
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