SEMICONDUCTOR PROCESSING APPARATUS

A semiconductor processing apparatus includes an upper electrode and a substrate on a lower electrode disposed inside the process chamber, a first power generator configured to provide a low-frequency signal to the lower electrode, wherein the low-frequency signal varies between a reference voltage...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK, Chanhoon, YOON, Junho, KIM, Yonghwan, KIM, Hyuk, PARK, Sangwuk, SUNG, Edward
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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