PARAMETER DERIVING DEVICE, PARAMETER DERIVING METHOD, AND PARAMETER DERIVING PROGRAM

A global optimum solution of a simulation parameter is derived using a shape simulator. A parameter deriving device includes a generating unit configured to generate a plurality of combinations of data indicating pre-processing shapes and data indicating post-processing shapes of substrates processe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MOKI, Hironori, KATO, Takahiko
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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