STACKED SEMICONDUCTOR DEVICE INCLUDING HYBRID BONDING STRUCTURE

A stacked semiconductor device may include a first semiconductor chip including a first bonded surface and a second semiconductor chip including a second bonded surface facing the first bonded surface, the first and second bonded surfaces being bonded to each other. The first semiconductor chip incl...

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description A stacked semiconductor device may include a first semiconductor chip including a first bonded surface and a second semiconductor chip including a second bonded surface facing the first bonded surface, the first and second bonded surfaces being bonded to each other. The first semiconductor chip includes a first substrate, at least one first power interconnect disposed between the first substrate and the first bonded surface of the first semiconductor chip and configured to carry a power-supply voltage therethrough, and at least one first power hybrid bonding structure disposed to be in contact with the first power interconnect and configured to extend along the same path as a routing path of the first power interconnect. The second semiconductor chip includes a second substrate, at least one second power interconnect disposed between the second bonded surface and the second substrate and configured to carry a power-supply voltage therethrough, and at least one second power hybrid bonding structure disposed to be in contact with the second power interconnect and the first power hybrid bonding structure and configured to extend along the same path as a routing path of the second power interconnect.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title STACKED SEMICONDUCTOR DEVICE INCLUDING HYBRID BONDING STRUCTURE
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