IMAGE SENSOR AND METHOD OF FABRICATING THE SAME
An image sensor comprises a substrate having first and second surfaces opposite to each other, a fixed charge layer in contact with the second surface, an interlayer dielectric layer covering the first surface, a device isolation part adjacent to the first surface in the substrate, and a pixel isola...
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creator | BAE, Byeongtaek YOO, Seunghwi KIM, Jingyun KIM, Kook Tae |
description | An image sensor comprises a substrate having first and second surfaces opposite to each other, a fixed charge layer in contact with the second surface, an interlayer dielectric layer covering the first surface, a device isolation part adjacent to the first surface in the substrate, and a pixel isolation part in the substrate. The pixel isolation part includes a conductive pattern, a buried dielectric pattern, and an isolation dielectric pattern that is simultaneously in contact with the fixed charge layer and the interlayer dielectric layer. The isolation dielectric layer has a first thickness at a level between the buried dielectric pattern and the conductive pattern. The isolation dielectric layer has a second thickness at a level of a bottom surface of the fixed charge layer. The second thickness is different from the first thickness. |
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fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2024030263A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2024030263A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2024030263A13</originalsourceid><addsrcrecordid>eNrjZND39HV0d1UIdvUL9g9ScPRzUfB1DfHwd1Hwd1Nwc3QK8nR2DPH0c1cI8QAqcvR15WFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8aHBRgZGJgbGBkZmxo6GxsSpAgBk_yZd</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>IMAGE SENSOR AND METHOD OF FABRICATING THE SAME</title><source>esp@cenet</source><creator>BAE, Byeongtaek ; YOO, Seunghwi ; KIM, Jingyun ; KIM, Kook Tae</creator><creatorcontrib>BAE, Byeongtaek ; YOO, Seunghwi ; KIM, Jingyun ; KIM, Kook Tae</creatorcontrib><description>An image sensor comprises a substrate having first and second surfaces opposite to each other, a fixed charge layer in contact with the second surface, an interlayer dielectric layer covering the first surface, a device isolation part adjacent to the first surface in the substrate, and a pixel isolation part in the substrate. The pixel isolation part includes a conductive pattern, a buried dielectric pattern, and an isolation dielectric pattern that is simultaneously in contact with the fixed charge layer and the interlayer dielectric layer. The isolation dielectric layer has a first thickness at a level between the buried dielectric pattern and the conductive pattern. The isolation dielectric layer has a second thickness at a level of a bottom surface of the fixed charge layer. The second thickness is different from the first thickness.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240125&DB=EPODOC&CC=US&NR=2024030263A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240125&DB=EPODOC&CC=US&NR=2024030263A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BAE, Byeongtaek</creatorcontrib><creatorcontrib>YOO, Seunghwi</creatorcontrib><creatorcontrib>KIM, Jingyun</creatorcontrib><creatorcontrib>KIM, Kook Tae</creatorcontrib><title>IMAGE SENSOR AND METHOD OF FABRICATING THE SAME</title><description>An image sensor comprises a substrate having first and second surfaces opposite to each other, a fixed charge layer in contact with the second surface, an interlayer dielectric layer covering the first surface, a device isolation part adjacent to the first surface in the substrate, and a pixel isolation part in the substrate. The pixel isolation part includes a conductive pattern, a buried dielectric pattern, and an isolation dielectric pattern that is simultaneously in contact with the fixed charge layer and the interlayer dielectric layer. The isolation dielectric layer has a first thickness at a level between the buried dielectric pattern and the conductive pattern. The isolation dielectric layer has a second thickness at a level of a bottom surface of the fixed charge layer. The second thickness is different from the first thickness.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZND39HV0d1UIdvUL9g9ScPRzUfB1DfHwd1Hwd1Nwc3QK8nR2DPH0c1cI8QAqcvR15WFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8aHBRgZGJgbGBkZmxo6GxsSpAgBk_yZd</recordid><startdate>20240125</startdate><enddate>20240125</enddate><creator>BAE, Byeongtaek</creator><creator>YOO, Seunghwi</creator><creator>KIM, Jingyun</creator><creator>KIM, Kook Tae</creator><scope>EVB</scope></search><sort><creationdate>20240125</creationdate><title>IMAGE SENSOR AND METHOD OF FABRICATING THE SAME</title><author>BAE, Byeongtaek ; YOO, Seunghwi ; KIM, Jingyun ; KIM, Kook Tae</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2024030263A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2024</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>BAE, Byeongtaek</creatorcontrib><creatorcontrib>YOO, Seunghwi</creatorcontrib><creatorcontrib>KIM, Jingyun</creatorcontrib><creatorcontrib>KIM, Kook Tae</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BAE, Byeongtaek</au><au>YOO, Seunghwi</au><au>KIM, Jingyun</au><au>KIM, Kook Tae</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>IMAGE SENSOR AND METHOD OF FABRICATING THE SAME</title><date>2024-01-25</date><risdate>2024</risdate><abstract>An image sensor comprises a substrate having first and second surfaces opposite to each other, a fixed charge layer in contact with the second surface, an interlayer dielectric layer covering the first surface, a device isolation part adjacent to the first surface in the substrate, and a pixel isolation part in the substrate. The pixel isolation part includes a conductive pattern, a buried dielectric pattern, and an isolation dielectric pattern that is simultaneously in contact with the fixed charge layer and the interlayer dielectric layer. The isolation dielectric layer has a first thickness at a level between the buried dielectric pattern and the conductive pattern. The isolation dielectric layer has a second thickness at a level of a bottom surface of the fixed charge layer. The second thickness is different from the first thickness.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | IMAGE SENSOR AND METHOD OF FABRICATING THE SAME |
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