LIQUID EJECTION HEAD, ELEMENT SUBSTRATE, AND MANUFACTURING METHODS THEREOF

A method for manufacturing an element substrate of a liquid ejection head, the method includes forming a silicon-based film layer including carbon on one surface of a base substrate, laminating a silicon substrate on the film layer formed on the one surface of the base substrate and bonding the sili...

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Bibliographische Detailangaben
1. Verfasser: TAKEUCHI, SOUTA
Format: Patent
Sprache:eng
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