SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE

A scanning micromirror system includes a base having an axis passing therethrough, a plurality of support flexures coupled to the base, and a platform coupled to the base by the plurality of support flexures. The platform has a first side and a second side opposing the first side and is operable to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Gamet, Julien, Gamper, Stephan Arthur
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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