MANUFACTURING METHOD OF SUBSTRATE
In the state in which a laser beam is split in such a manner that multiple focal points that line up along a first direction parallel to a specific crystal plane of a single-crystal material that configures an ingot are formed, the ingot and the multiple focal points are relatively moved along a sec...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | NOMOTO, Asahi |
| description | In the state in which a laser beam is split in such a manner that multiple focal points that line up along a first direction parallel to a specific crystal plane of a single-crystal material that configures an ingot are formed, the ingot and the multiple focal points are relatively moved along a second direction parallel to this specific crystal plane to form a separation layer. In this case, modified parts are formed with each of the multiple focal points being the center of the modified part. In addition, it becomes easier for cracks to extend from these modified parts along the specific crystal plane. Thus, in this case, the cracks formed inside the ingot can be made longer without setting the output power of the laser beam higher. As a result, it becomes possible to improve the throughput in manufacturing a substrate from the ingot. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2024009773A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2024009773A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2024009773A13</originalsourceid><addsrcrecordid>eNrjZFD0dfQLdXN0DgkN8vRzV_B1DfHwd1Hwd1MIDnUKDglyDHHlYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXxocFGBkYmBgaW5ubGjobGxKkCALFkI0c</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MANUFACTURING METHOD OF SUBSTRATE</title><source>esp@cenet</source><creator>NOMOTO, Asahi</creator><creatorcontrib>NOMOTO, Asahi</creatorcontrib><description>In the state in which a laser beam is split in such a manner that multiple focal points that line up along a first direction parallel to a specific crystal plane of a single-crystal material that configures an ingot are formed, the ingot and the multiple focal points are relatively moved along a second direction parallel to this specific crystal plane to form a separation layer. In this case, modified parts are formed with each of the multiple focal points being the center of the modified part. In addition, it becomes easier for cracks to extend from these modified parts along the specific crystal plane. Thus, in this case, the cracks formed inside the ingot can be made longer without setting the output power of the laser beam higher. As a result, it becomes possible to improve the throughput in manufacturing a substrate from the ingot.</description><language>eng</language><subject>CLADDING OR PLATING BY SOLDERING OR WELDING ; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ; MACHINE TOOLS ; METAL-WORKING NOT OTHERWISE PROVIDED FOR ; PERFORMING OPERATIONS ; SOLDERING OR UNSOLDERING ; TRANSPORTING ; WELDING ; WORKING BY LASER BEAM</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240111&DB=EPODOC&CC=US&NR=2024009773A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240111&DB=EPODOC&CC=US&NR=2024009773A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NOMOTO, Asahi</creatorcontrib><title>MANUFACTURING METHOD OF SUBSTRATE</title><description>In the state in which a laser beam is split in such a manner that multiple focal points that line up along a first direction parallel to a specific crystal plane of a single-crystal material that configures an ingot are formed, the ingot and the multiple focal points are relatively moved along a second direction parallel to this specific crystal plane to form a separation layer. In this case, modified parts are formed with each of the multiple focal points being the center of the modified part. In addition, it becomes easier for cracks to extend from these modified parts along the specific crystal plane. Thus, in this case, the cracks formed inside the ingot can be made longer without setting the output power of the laser beam higher. As a result, it becomes possible to improve the throughput in manufacturing a substrate from the ingot.</description><subject>CLADDING OR PLATING BY SOLDERING OR WELDING</subject><subject>CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING</subject><subject>MACHINE TOOLS</subject><subject>METAL-WORKING NOT OTHERWISE PROVIDED FOR</subject><subject>PERFORMING OPERATIONS</subject><subject>SOLDERING OR UNSOLDERING</subject><subject>TRANSPORTING</subject><subject>WELDING</subject><subject>WORKING BY LASER BEAM</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFD0dfQLdXN0DgkN8vRzV_B1DfHwd1Hwd1MIDnUKDglyDHHlYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXxocFGBkYmBgaW5ubGjobGxKkCALFkI0c</recordid><startdate>20240111</startdate><enddate>20240111</enddate><creator>NOMOTO, Asahi</creator><scope>EVB</scope></search><sort><creationdate>20240111</creationdate><title>MANUFACTURING METHOD OF SUBSTRATE</title><author>NOMOTO, Asahi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2024009773A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2024</creationdate><topic>CLADDING OR PLATING BY SOLDERING OR WELDING</topic><topic>CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING</topic><topic>MACHINE TOOLS</topic><topic>METAL-WORKING NOT OTHERWISE PROVIDED FOR</topic><topic>PERFORMING OPERATIONS</topic><topic>SOLDERING OR UNSOLDERING</topic><topic>TRANSPORTING</topic><topic>WELDING</topic><topic>WORKING BY LASER BEAM</topic><toplevel>online_resources</toplevel><creatorcontrib>NOMOTO, Asahi</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NOMOTO, Asahi</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MANUFACTURING METHOD OF SUBSTRATE</title><date>2024-01-11</date><risdate>2024</risdate><abstract>In the state in which a laser beam is split in such a manner that multiple focal points that line up along a first direction parallel to a specific crystal plane of a single-crystal material that configures an ingot are formed, the ingot and the multiple focal points are relatively moved along a second direction parallel to this specific crystal plane to form a separation layer. In this case, modified parts are formed with each of the multiple focal points being the center of the modified part. In addition, it becomes easier for cracks to extend from these modified parts along the specific crystal plane. Thus, in this case, the cracks formed inside the ingot can be made longer without setting the output power of the laser beam higher. As a result, it becomes possible to improve the throughput in manufacturing a substrate from the ingot.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US2024009773A1 |
| source | esp@cenet |
| subjects | CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM |
| title | MANUFACTURING METHOD OF SUBSTRATE |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-03T00%3A50%3A46IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=NOMOTO,%20Asahi&rft.date=2024-01-11&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2024009773A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |