PIEZOELECTRIC ELEMENT UNIT AND RESONATOR

A piezoelectric element unit includes: a substrate having a main surface; a piezoelectric film arranged on the substrate and having a first side surface, a second side surface opposite the first side surface, and a bottom surface that faces the main surface and is connected to the first side surface...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: SHIMOJI, Noriyuki
Format: Patent
Sprache:eng
Schlagworte:
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