PIEZOELECTRIC ELEMENT UNIT AND RESONATOR

A piezoelectric element unit includes: a substrate having a main surface; a piezoelectric film arranged on the substrate and having a first side surface, a second side surface opposite the first side surface, and a bottom surface that faces the main surface and is connected to the first side surface...

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1. Verfasser: SHIMOJI, Noriyuki
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creator SHIMOJI, Noriyuki
description A piezoelectric element unit includes: a substrate having a main surface; a piezoelectric film arranged on the substrate and having a first side surface, a second side surface opposite the first side surface, and a bottom surface that faces the main surface and is connected to the first side surface and the second side surface; a first electrode arranged on the substrate and in contact with the first side surface of the piezoelectric film; and a second electrode arranged on the substrate in contact with at least one of the first side surface and the second side surface of the piezoelectric film, and provided to be separated from the first electrode.
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a piezoelectric film arranged on the substrate and having a first side surface, a second side surface opposite the first side surface, and a bottom surface that faces the main surface and is connected to the first side surface and the second side surface; a first electrode arranged on the substrate and in contact with the first side surface of the piezoelectric film; and a second electrode arranged on the substrate in contact with at least one of the first side surface and the second side surface of the piezoelectric film, and provided to be separated from the first electrode.</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
title PIEZOELECTRIC ELEMENT UNIT AND RESONATOR
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